Product Flyers

Batch Immersion

 Pinnacle Carrierless Wet Station

Pinnacle Carrierless Wet Station

 GAMA Automated Wet Station

GAMA Automated Wet Station

 V3 Compact Batch Immersion System

V3 Compact Batch Immersion System

CVD

 APS Series SiC Crystal Growth System

APS Series SiC Crystal Growth System

 EPEE 550 Plasma Enhanced CVD

EPEE 550 Plasma Enhanced CVD

Furnace

 HORIS Diffusion & Oxidation Horizontal Furnace

HORIS Diffusion & Oxidation Horizontal Furnace

 FLOURIS 201 Anneal & Oxidation Vertical Furnace

FLOURIS 201 Anneal & Oxidation Vertical Furnace

Plasma Etch

 ELEDE® 380E & 380F ICP Etch System

ELEDE® 380E & 380F ICP Etch System

 GSE C200 Plasma Etcher

GSE C200 Plasma Etcher

 NMC508DTE Deep Silicon Trench Etch System

NMC508DTE Deep Silicon Trench Etch System

 ELEDE® 380G+/G380A/G380C/G380CR Plasma Etcher

ELEDE® 380G+/G380A/G380C/G380CR Plasma Etcher

 HSE M200 Plasma Etch System

HSE M200 Plasma Etch System

 NMC508M Aluminum Metal Etch System

NMC508M Aluminum Metal Etch System

 GDE C200 Plasma Etch System

GDE C200 Plasma Etch System

 NMC508C Silicon Etch System

NMC508C Silicon Etch System

PVD

 eVictor GX20 Physical Vapor Deposition System

eVictor GX20 Physical Vapor Deposition System

 iTops A230 AlN Sputter System

iTops A230 AlN Sputter System

 iTops i233 Plus ITO Sputter System

iTops i233 Plus ITO Sputter System

 POLARIS G620 Physical Vapor Deposition System

POLARIS G620 Physical Vapor Deposition System

Single Wafer

 SAQUA Single Wafer System

SAQUA Single Wafer System

Offline Tools

 Bpure Tube & Boat Cleaning Tool

Bpure Tube & Boat Cleaning Tool

 ClearIQ Mask Cleaning System

ClearIQ Mask Cleaning System

 GSE C200 Plasma Etcher

GSE C200 Plasma Etcher