PVD for Power IC Technology

NAURA Akrion offers an expandable set of PVD (physical vapor deposition) tools that deposit a wide variety of metal and oxide target materials with excellent film quality including through silicon via structures. The Polaris and eVictor products offer optional degas and preclean chambers along with the PVD modules and can accommodate up to 10 process modules in the dual transfer module, eVictor platform.

Power ICs control the conversion of electric power from one form to another. They are the intermediary between a Source (generates power) and a Load (consumes power). Power ICs serve as either a switch (MOSFET, IGBT & BJT) or a rectifier (diodes & thyristors) and can be manufactured from a variety of materials to include silicon, silicon carbide or gallium nitride with several promising compound semiconductor materials in the wings. Today, we all rely on Power ICs for everyday life essentials such as cellphone, tablet and laptop chargers to portable battery packs to hybrid vehicles. Applications are rapidly expanding in the energy (PV, Grid, Wind), transportation (Rail, Automotive, Ships), consumer markets. The increasing capabilities of Power ICs to handle higher voltages, currents and frequencies with reduced power loss is rapidly expanding adoption in multiple new fields.

eVictor GX20 Physical Vapor Deposition System

 eVictor GX20 for Physical Vapor Deposition

eVictor GX20 for Physical Vapor Deposition

eVictor GX20 is a fully automated general PVD sputtering system that supports a wide variety of applications and material in a high capacity platform. It has a flexible chamber configuration around dual transfer modules and can be configured with up to ten modules.

POLARIS G620 Physical Vapor Deposition System

 POLARIS G620 Physical Vapor Deposition System

POLARIS G620 Physical Vapor Deposition System

Polaris G620 is a fully automated general PVD sputtering system that supports a wide variety of applications and materials. It has a flexible chamber configuration around a single transfer module and can be configured with up to six modules.