PVD for MEMS Technology
NAURA Akrion offers an expandable set of PVD (physical vapor deposition) tools that deposit a wide variety of metal and oxide target materials with excellent film quality including through silicon via structures. The Polaris and eVictor products offer optional degas and preclean chambers along with the PVD modules and can accommodate up to 10 process modules in the dual transfer module, eVictor platform.
Micro Electromechanical Systems (MEMS) are micro sensors or actuators that enable digital and analog microelectronics to interface with the outside world in a wide variety of applications. The most prevalent applications include smart devices, display technologies, gaming systems, fitness wearables, medical and scientific instruments, accelerometers for automobile airbags, tire sensor pressures and ink jet print heads.
eVictor GX20 Physical Vapor Deposition System
eVictor GX20 is a fully automated general PVD sputtering system that supports a wide variety of applications and material in a high capacity platform. It has a flexible chamber configuration around dual transfer modules and can be configured with up to ten modules.
POLARIS G620 Physical Vapor Deposition System
Polaris G620 is a fully automated general PVD sputtering system that supports a wide variety of applications and materials. It has a flexible chamber configuration around a single transfer module and can be configured with up to six modules.