PVD for Analog IC Technology

NAURA Akrion offers an expandable set of PVD (physical vapor deposition) tools for analog IC technology that deposit a wide variety of metal and oxide target materials with excellent film quality including through silicon via structures. The Polaris and eVictor products offer optional degas and preclean chambers along with the PVD modules and can accommodate up to 10 process modules in the dual transfer module, eVictor platform.

Analog ICs (integrated circuits) condition and regulate “real world” functions such as temperature, speed, sound and electrical current. Unlike a digital IC that processes discrete levels of voltage (i.e., ON/OFF), Analog ICs process voltage/current that varies continuously (i.e., an analog signal). Analog ICs are used in a variety of applications such as operational amplifier (op-amp), comparator, clock/timer, analog-to-digital convertor (ADC), digital-to-analog convertor (DAC), sensor, and power management (usually referred to as Power ICs). While the feature sizes and line widths of Analog ICs are not as densely-packed as a typical Digital IC, the manufacturing challenges are no less demanding.

eVictor GX20 Physical Vapor Deposition System

eVictor GX20 is a fully automated general PVD sputtering system that supports a wide variety of applications and material in a high capacity platform. It has a flexible chamber configuration around dual transfer modules and can be configured with up to ten modules.

POLARIS G620 Physical Vapor Deposition System

Polaris G620 is a fully automated general PVD sputtering system that supports a wide variety of applications and materials. It has a flexible chamber configuration around a single transfer module and can be configured with up to six modules.