Product Flyers
Batch Immersion
Pinnacle Carrierless Wet Station
GAMA Automated Wet Station
V3 Compact Batch Immersion System
CVD
APS180G Plus SiC Crystal Growth Furnace
EPEE 550 Plasma Enhanced CVD
Furnace
FLOURIS 201 Anneal & Oxidation Vertical Furnace
Plasma Etch
ELEDE® 380E & 380F ICP Etch System
GSE C200 Plasma Etcher
NMC508DTE Deep Silicon Trench Etch System
ELEDE® 380G+/G380A/G380C/G380CR Plasma Etcher
HSE M200 Plasma Etch System
NMC508M Aluminum Metal Etch System
GDE C200 Plasma Etch System
NMC508C Silicon Etch System
PVD
eVictor GX20 Physical Vapor Deposition System
iTops A230 AlN Sputter System
iTops i233 Plus ITO Sputter System
POLARIS G620 Physical Vapor Deposition System
Single Wafer
SAQUA Single Wafer System
Offline Tools
Bpure Tube & Boat Cleaning Tool
ClearIQ Mask Cleaning System
GSE C200 Plasma Etcher