Furnaces for MEMS Technology

NAURA Akrion’s horizontal furnace line, HORIS, provides diffusion, oxidation, annealing & alloying capabilities for substrate sizes from 100 – 200 mm. With a flexible configuration of up to five independently-controlled furnace tubes, the HORIS offers advanced process control and safety features to meet today’s challenging requirements all supported on a modern, sustainable platform.

Micro Electromechanical Systems (MEMS) are micro sensors or actuators that enable digital and analog microelectronics to interface with the outside world in a wide variety of applications. The most prevalent applications include smart devices, display technologies, gaming systems, fitness wearables, medical and scientific instruments, accelerometers for automobile airbags, tire sensor pressures and ink jet print heads.

HORIS Diffusion/Oxidation Horizontal Furnace

The HORIS Series of horizontal furnaces are a highly cost-effective line of diffusion, oxidation, annealing, alloying systems that can be used in a wide variety of applications and substrate types/sizes.