Furnaces for Analog IC Technology

NAURA Akrion’s complete product line of horizontal, HORIS, and vertical, FLOURIS, furnaces provide diffusion, oxidation, annealing & alloying capabilities for substrate sizes from 100 – 200 mm. Both products offer advanced process control and safety features to meet today’s challenging requirements all supported on a modern, sustainable platform.

Analog ICs (integrated circuits) condition and regulate “real world” functions such as temperature, speed, sound and electrical current. Unlike a digital IC that processes discrete levels of voltage (i.e., ON/OFF), Analog ICs process voltage/current that varies continuously (i.e., an analog signal). Analog ICs are used in a variety of applications such as operational amplifier (op-amp), comparator, clock/timer, analog-to-digital convertor (ADC), digital-to-analog convertor (DAC), sensor, and power management (usually referred to as Power ICs). While the feature sizes and line widths of Analog ICs are not as densely-packed as a typical Digital IC, the manufacturing challenges are no less demanding.

HORIS Diffusion/Oxidation Horizontal Furnace

The HORIS Series of horizontal furnaces are a highly cost-effective line of diffusion, oxidation, annealing, alloying systems that can be used in a wide variety of applications and substrate types/sizes.

FLOURIS 201 Anneal/Oxidation Vertical Furnace

The FLOURIS 201 Vertical Anneal/Oxidation Furnace provides medium and high temperature annealing or oxidation of 200 mm silicon wafers for advanced IC devices. Based upon Naura’s popular 300 mm THEORIS 302, the FLOURIS 201 provides 200 mm fabs with the same reliability and process control in the growth of silicon dioxide films for buffer dielectric, sacrificial oxide, and gate oxide layers in front-end of line processing.