NAURA Akrion PSG etch & clean application is used to remove the deposited phosphosilicate glass from the wafer to prepare it for AR nitride deposition.
click for full-size image
- Multicrystalline – Saw Damage Texturization and Clean
- Monocrystalline – Saw Damage Texturization and Clean
- Advanced Applications
For further information or to set up a teleconference with a NAURA Akrion process expert, please send an email request to firstname.lastname@example.org