Our success was built on the design and production of customizable modular batch immersion solutions for clean and strip processes in the Analog IC, Power IC, MEMS, and R&D technologies.

Providing highly cost-effective dry etch, deposition and thermal wafer fab equipment solutions to semiconductor device fabs and substrate suppliers.

Delivering full technical support including installations, maintenance, advanced process assistance, training, parts repair and replacement, system upgrades, and emergency service with 24 hour phone support.

NAURA Akrion

NAURA Akrion is a leading supplier of advanced wafer surface preparation solutions used in the fabrication of microelectronic devices. The customized equipment, software & process solutions we develop enable our customers to achieve their unique R&D/production targets on 150/200/300mm substrates, whether bare or patterned, for the precise removal of microcontaminants or bulk films.

As a wholly-owned subsidiary of Beijing NAURA Microelectronics, NAURA Akrion now provides a full complement of CVD, Etch, Furnace and Off-line process tools, supported by knowledgeable local engineers, to help our customers reduce their manufacturing costs in mature process areas.